The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2011
Filed:
Dec. 03, 2009
Minori Noguchi, Yokohama, JP;
Yoshimasa Ohshima, Yokohama, JP;
Hidetoshi Nishiyama, Fujisawa, JP;
Shunichi Matsumoto, Yokohama, JP;
Yukio Kembo, Tokyo, JP;
Ryouji Matsunaga, Chigasaka, JP;
Keiji Sakai, Tokyo, JP;
Takanori Ninomiya, Hiratsuka, JP;
Tetsuyai Watanabe, Honjo, JP;
Hisato Nakamura, Kamisato-machi, JP;
Takahiro Jingu, Takasaki, JP;
Yoshio Morishige, Honjo, JP;
Shuichi Chikamatsu, Kounosu, JP;
Minori Noguchi, Yokohama, JP;
Yoshimasa Ohshima, Yokohama, JP;
Hidetoshi Nishiyama, Fujisawa, JP;
Shunichi Matsumoto, Yokohama, JP;
Yukio Kembo, Tokyo, JP;
Ryouji Matsunaga, Chigasaka, JP;
Keiji Sakai, Tokyo, JP;
Takanori Ninomiya, Hiratsuka, JP;
Tetsuyai Watanabe, Honjo, JP;
Hisato Nakamura, Kamisato-machi, JP;
Takahiro Jingu, Takasaki, JP;
Yoshio Morishige, Honjo, JP;
Shuichi Chikamatsu, Kounosu, JP;
Hitachi, Ltd., Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A method for detecting defects on an object includes an illumination optical unit which obliquely projects a laser focused onto a line on a surface of the object and white-color, a table unit which mounts the specimen and which is movable, a detection optical unit which detects with an image sensor an image of light formed by light reflected from the object and passed through a filter which blocks diffraction light resulting from patterns formed on the object, a signal processor which processes a signal outputted from the image sensor of the detection optical unit to extract defects of the object, and a display unit which displays information of defects extracted by the signal processor. The filter is adjustable.