The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2009
Filed:
Mar. 05, 2007
Minori Noguchi, Yokohama, JP;
Yoshimasa Ohshima, Yokohama, JP;
Hidetoshi Nishiyama, Fujisawa, JP;
Shunichi Matsumoto, Yokohama, JP;
Yukio Kembo, Tokyo, JP;
Ryouji Matsunaga, Chigasaki, JP;
Keiji Sakai, Tokyo, JP;
Takanori Ninomiya, Hiratsuka, JP;
Tetsuya Watanabe, Honjo, JP;
Hisato Nakamura, Kamisato-machi, JP;
Takahiro Jingu, Takasaki, JP;
Yoshio Morishige, Honjo, JP;
Shuichi Chikamatsu, Kounosu, JP;
Minori Noguchi, Yokohama, JP;
Yoshimasa Ohshima, Yokohama, JP;
Hidetoshi Nishiyama, Fujisawa, JP;
Shunichi Matsumoto, Yokohama, JP;
Yukio Kembo, Tokyo, JP;
Ryouji Matsunaga, Chigasaki, JP;
Keiji Sakai, Tokyo, JP;
Takanori Ninomiya, Hiratsuka, JP;
Tetsuya Watanabe, Honjo, JP;
Hisato Nakamura, Kamisato-machi, JP;
Takahiro Jingu, Takasaki, JP;
Yoshio Morishige, Honjo, JP;
Shuichi Chikamatsu, Kounosu, JP;
Hitachi, Ltd, Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A method for detecting defects on a specimen includes mounting a specimen on a table with which is movable, obliquely projecting a laser as a line onto a surface of the specimen, detecting with an image sensor an image of light formed by light reflected from the specimen and passed through a filter which blocks scattered light resulting from repetitive patterns formed on the specimen, processing a signal outputted from the image sensor to extract defects of the specimen, and a displaying information of defects extracted by the signal processor.