The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2007
Filed:
May. 13, 2005
Hiroshi Morioka, Ebina, JP;
Minori Noguchi, Yokohama, JP;
Yoshimasa Ohshima, Yokohama, JP;
Yukio Kembo, Yokohama, JP;
Hidetoshi Nishiyama, Fujisawa, JP;
Kazuhiko Matsuoka, Gunma-ken, JP;
Yoshiharu Shigyo, Takasaki, JP;
Hiroshi Morioka, Ebina, JP;
Minori Noguchi, Yokohama, JP;
Yoshimasa Ohshima, Yokohama, JP;
Yukio Kembo, Yokohama, JP;
Hidetoshi Nishiyama, Fujisawa, JP;
Kazuhiko Matsuoka, Gunma-ken, JP;
Yoshiharu Shigyo, Takasaki, JP;
Renesas Technology Corp., Tokyo, JP;
Abstract
An apparatus and method for detecting defects on a specimen includes an illumination optical unit which obliquely projects a laser onto a region which is longer in one direction on a surface of a specimen than in a transverse direction, a table unit which mounts the specimen and which is movable, a detection optical unit which detects light from the specimen illuminated by the laser with an image sensor while the table is moving, and a signal processor. The signal processor processes a signal outputted from the image sensor of the detection optical unit and converted to a digital signal and extracts defects of the specimen by comparing the converted digital signal with a reference digital signal. A display unit displays information of defects extracted by the signal processor.