The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2010
Filed:
Oct. 06, 2005
Minori Noguchi, Yokohama, JP;
Yoshimasa Ohshima, Yokohama, JP;
Hidetoshi Nishiyama, Fujisawa, JP;
Shunichi Matsumoto, Yokohama, JP;
Yukio Kembo, Tokyo, JP;
Ryouji Matsunaga, Chigasaki, JP;
Keiji Sakai, Tokyo, JP;
Takanori Ninomiya, Hiratsuka, JP;
Tetsuya Watanabe, Honjo, JP;
Hisato Nakamura, Kamisato-machi, JP;
Takahiro Jingu, Takasaki, JP;
Yoshio Morishige, Honjo, JP;
Shuichi Chikamatsu, Kounosu, JP;
Minori Noguchi, Yokohama, JP;
Yoshimasa Ohshima, Yokohama, JP;
Hidetoshi Nishiyama, Fujisawa, JP;
Shunichi Matsumoto, Yokohama, JP;
Yukio Kembo, Tokyo, JP;
Ryouji Matsunaga, Chigasaki, JP;
Keiji Sakai, Tokyo, JP;
Takanori Ninomiya, Hiratsuka, JP;
Tetsuya Watanabe, Honjo, JP;
Hisato Nakamura, Kamisato-machi, JP;
Takahiro Jingu, Takasaki, JP;
Yoshio Morishige, Honjo, JP;
Shuichi Chikamatsu, Kounosu, JP;
Hitachi, Ltd., , JP;
Abstract
An apparatus for detecting defects on a specimen including an illumination optical unit which obliquely projects a laser onto a region which is longer in one direction than in a direction transverse to said one direction on a surface of a specimen, a table unit which mounts said specimen and which is movable, a detection optical unit which detects with an image sensor an image of light formed by light reflected from said specimen in both directions of the one direction and the direction transverse and which reflected light in both directions is formed on said image sensor while said table is moving, a signal processor which processes a signal outputted from said image sensor of said detection optical unit to extract defects of said specimen. A display unit which displays information of defects extracted by said signal processor.