Company Filing History:
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Years Active: 2002-2025
Title: **Innovative Contributions of Sanjay Gopinath in Semiconductor Technology**
Introduction
Sanjay Gopinath, located in Fremont, CA, is a renowned inventor who has made significant contributions to the field of semiconductor technology. With an impressive portfolio of 29 patents, Gopinath is recognized for his innovative methods that enhance the efficiency of tungsten deposition processes, key to various applications in technology.
Latest Patents
Among his latest patents is the method for **Nucleation-free tungsten deposition**. This invention outlines a technique for depositing tungsten (W) films without the need for a nucleation layer. The process involves the application of a conformal reducing agent layer made of boron (B) and/or silicon (Si) on a substrate. This layer is designed to conform to the substrate’s topography, ensuring that features meant for tungsten filling are adequately addressed. The reducing agent is then exposed to a fluorine-containing tungsten precursor, which reduces to form elemental tungsten, ultimately leading to the formation of a conformal tungsten layer.
Another crucial patent by Gopinath details **Metal deposition** techniques that include innovative designs for showerheads used in semiconductor fabrication. This patent introduces various configurations for showerheads capable of efficiently distributing gas during metal deposition. Key features of the showerhead include a faceplate, a back plate with a gas inlet, and a unique baffle plate to optimize gas flow, helping to improve the quality of the deposition process.
Career Highlights
Sanjay Gopinath has held significant roles in prominent companies within the semiconductor industry. He has contributed his expertise at Novellus Systems Incorporated and Lam Research Corporation, organizations recognized for their advancements in wafer fabrication technology. His work has consistently pushed the boundaries of semiconductor manufacturing processes, leading to more efficient production methods.
Collaborations
Throughout his career, Gopinath has collaborated with notable professionals, including Michal Danek and Ajit P Paranjpe. These partnerships have enabled him to refine his ideas and contribute to cutting-edge innovations that have furthered the capabilities of semiconductor technology.
Conclusion
Sanjay Gopinath's contributions to the field of semiconductor technology through his innovative patents represent a significant evolution in manufacturing processes. His pioneering work on tungsten deposition and metal deposition methods has not only enhanced the efficiency of production but has also paved the way for future advancements in semiconductor fabrication. As technology continues to advance, Gopinath remains a key figure in driving innovation forward.