The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2024
Filed:
Aug. 10, 2020
Lam Research Corporation, Fremont, CA (US);
Pragna Nannapaneni, San Jose, CA (US);
Novy Tjokro, Union City, CA (US);
Sema Ermez, Santa Clara, CA (US);
Ruopeng Deng, San Jose, CA (US);
Tianhua Yu, Tracy, CA (US);
Xiaolan Ba, Fremont, CA (US);
Sanjay Gopinath, Fremont, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
Described herein are methods of filling features with tungsten and related apparatus. The methods described herein involve deposition of a tungsten nucleation layer prior to deposition of a bulk layer. The methods involve multiple atomic layer deposition (ALD) cycles. According to various embodiments, both a boron-containing reducing agent and silicon-reducing agent may be pulses during a single cycle to react with a tungsten-containing precursor and form a tungsten film.