Sema Ermez

Title: Sema Ermez: Innovator in Metal Deposition Technologies

Introduction

Sema Ermez is a prominent inventor based in San Jose, California, known for her contributions to the field of metal deposition technologies. With a total of 6 patents to her name, she has made significant advancements that enhance the efficiency and effectiveness of metal fill processes.

Latest Patents

One of her latest patents is titled "Method for preventing line bending during metal fill process." This invention provides methods and apparatuses for reducing line bending when depositing metals such as tungsten, molybdenum, ruthenium, or cobalt into features on substrates. The method involves periodically exposing the feature to nitrogen, oxygen, or ammonia during atomic layer deposition, chemical vapor deposition, or sequential chemical vapor deposition to minimize interactions between the deposited metal and the sidewalls of the feature. This technique is particularly suitable for deposition into V-shaped features.

Another notable patent is "Nucleation-free tungsten deposition." This invention outlines methods for depositing tungsten (W) films without the need for a nucleation layer. The process includes depositing a conformal reducing agent layer of boron (B) and/or silicon (Si) on a substrate that contains a feature to be filled with tungsten. The reducing agent layer is then exposed to a fluorine-containing tungsten precursor, which is reduced by the reducing agent to form a layer of elemental tungsten. This innovative approach allows for the conversion of the reducing agent layer into a conformal tungsten layer.

Career Highlights

Sema Ermez has established herself as a key figure in her field through her work at Lam Research Corporation. Her expertise in metal deposition technologies has contributed to the company's reputation for innovation and excellence in semiconductor manufacturing.

Collaborations

Throughout her career, Sema has collaborated with talented professionals, including her coworkers Sanjay Gopinath and Michal Danek. These collaborations have fostered an environment of creativity and innovation, leading to the development of groundbreaking technologies.

Conclusion

Sema Ermez's contributions to metal deposition technologies exemplify her commitment to innovation and excellence. Her patents reflect her expertise and dedication to advancing the field, making her a notable inventor in the industry.