This inventor holds 23 USPTO granted patents and 2 EPO patents, primarily in Semiconductor Manufacturing. Top assignees: Dowa Mining Co., Ltd., Tokyo Electron Limited, Tokyo Ohka Kogyo Co., Ltd.. Active years: 1987-2025.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Shiojiri, JP (1999 - 2000)
- Nagano, JP (2007)
- Chiyoda-ku, JP (2010)
- Koshi-Machi, JP (2009 - 2011)
- Koshi, JP (2010 - 2012)
- Tokyo, JP (1987 - 2022)
- Kumamoto, JP (2019 - 2022)
Company Filing History:
8 out of 217 
8 out of 10,904 
2 out of 1,236 
Years Active: 1987-2025
Areas of Expertise:
Title: Junji Nakamura: Innovator in Semiconductor Cleaning Technologies
Introduction
Junji Nakamura, based in Tokyo, Japan, is a distinguished inventor with a remarkable portfolio of 21 patents. His innovative contributions primarily focus on cleaning compositions and methods tailored for semiconductor manufacturing, addressing critical challenges within the industry.
Latest Patents
Nakamura's latest patents include a cleaning composition designed to effectively remove layers of interest without damaging or deforming the substrate or interlayer insulation film. This innovative cleaning method integrates a cleaning composition that utilizes components capable of decomposing specific layers, exemplified by a hard mask film. Additionally, he has developed a washing method and device that enhance layer removal efficiency by allowing decomposition at elevated temperatures, where vapors of suitable components, such as nitric acid or fluorinated alkyl sulfonic acid, play a crucial role.
Career Highlights
Throughout his career, Junji Nakamura has held pivotal roles in esteemed companies like Dowa Mining Co., Ltd. and Tokyo Electron Limited. His work has been instrumental in advancing cleaning technologies that are essential for the semiconductor manufacturing process, significantly impacting production efficiency and product quality.
Collaborations
Nakamura has collaborated with notable coworkers, including Masami Sakuraba and Masami Kimura. Together, they have contributed to the research and development of innovative cleaning solutions, further enhancing the capabilities of semiconductor manufacturing equipment.
Conclusion
Junji Nakamura's impactful innovations in cleaning processes for semiconductors underscore his status as a leading inventor in the field. His numerous patents not only highlight his technical expertise but also his commitment to advancing technology in semiconductor manufacturing, paving the way for future innovations in the industry.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile