The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2012
Filed:
Apr. 14, 2009
Yohsuke Shibuya, Tokyo, JP;
Yasuyuki Shirai, Tokyo, JP;
Hirofumi Asanuma, Tokyo, JP;
Junji Nakamura, Tokyo, JP;
Yohsuke Shibuya, Tokyo, JP;
Yasuyuki Shirai, Tokyo, JP;
Hirofumi Asanuma, Tokyo, JP;
Junji Nakamura, Tokyo, JP;
Canon Anelva Corporation, Kawasaki-shi, JP;
Abstract
There is provided a substrate support device capable of preventing powder dust from being produced. A thermoconductive intermediate member is interposed between a base table and a substrate support table and has a communication aperture path for communicating the aperture path of the base table with the aperture path of the substrate support table. An elastic member such as bellows tube is disposed in the communication aperture path of the thermoconductive intermediate member, for insulating the thermoconductive intermediate member from the inert gas which flows through the communication aperture path.