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For the Inventor, By the Inventor

Fuchu, Japan

Yasuyuki Shirai

USPTO Granted Patents = 5

Average Co-Inventor Count = 2.1

ph-index = 3

Forward Citations = 184(Granted Patents)


Location History:

  • Tokyo, JP (1987 - 2012)
  • Fuchu, JP (1988 - 2012)

Company Filing History:

goldMedal3 out of 256 
 
Anelva Corporation
 patents
silverMedal2 out of 355 
 
Canon Anelva Corporation
 patents

Years Active: 1987-2012

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5 patents (USPTO):Explore Patents
1. 8308440 - Vacuum processing apparatus, method of controlling vacuum processing apparatus, device manufacturing method, and storage medium (2012-11-13),
2. 8252118 - Substrate support device and plasma processing apparatus (2012-08-28),
3. 5569350 - Mechanism and method for mechanically removing a substrate (1996-10-29),
4. 4747928 - Substrate processing apparatus including wafer transporting and (1988-05-31),
5. 4643629 - Automatic loader (1987-02-17),
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