Enter inventor name

Average Co-Inventor Count = 4.4

ph-index = 13

Forward Citations = 494(Granted Patents)

Location History:

Kawasaki, JP (1995 - 1997)
Yamato, JP (1995 - 1999)
Yokkaichi, JP (2011 - 2012)
Mie, JP (2012)
Kanagawa-ken, JP (1997 - 2013)
Kanagawa, JP (2010 - 2013)
Fujisawa, JP (1997 - 2014)
Tokyo, JP (2014 - 2019)

Company Filing History:

40 out of 52,735

Kabushiki Kaisha Toshiba

Toshiba Memory Corporation

patents

5. 1 out of 832,843

Other

patents

where one patent can have more than one assignee

Years Active: 1995-2019

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Areas of Expertise:

Polishing Apparatus

Chemical Mechanical Polishing

Semiconductor Device Manufacturing

Endpoint Detection

Substrate Processing

Optical Measurement

Wafer Cleaning

Aqueous Dispersion

Planarizing Method

Residual Film Inspection

Organic Film Processing

Peripheral Processing

43 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 10207390 - Processing end point detection method, polishing method, and polishing apparatus (2019-02-19),

2. 8777694 - Polishing endpoint detection method (2014-07-15),

3. 8696924 - Polishing apparatus and polishing method (2014-04-15),

4. 8685857 - Chemical mechanical polishing method of organic film and method of manufacturing semiconductor device (2014-04-01),

5. 8568199 - Polishing endpoint detection apparatus (2013-10-29),

6. 8554356 - Processing end point detection method, polishing method, and polishing apparatus (2013-10-08),

7. 8506362 - Polishing apparatus and polishing method (2013-08-13),

8. 8388409 - Substrate polishing apparatus (2013-03-05),

9. 8152598 - Substrate treating method and substrate treating apparatus (2012-04-10),

10. 8119517 - Chemical mechanical polishing method and method of manufacturing semiconductor device (2012-02-21),

11. 8114776 - Method of manufacturing semiconductor device (2012-02-14),

12. 8084364 - Method of fabricating semiconductor device (2011-12-27),

13. 7767472 - Substrate processing method and substrate processing apparatus (2010-08-03),

14. 7744445 - Polishing apparatus and polishing method (2010-06-29),

15. 7700489 - Method of manufacturing a semiconductor device (2010-04-20),

Title: Atsushi Shigeta: Pioneering Inventor from Fujisawa

Introduction: Atsushi Shigeta is a renowned inventor hailing from Fujisawa, Japan, known for his groundbreaking contributions to the field of technology and innovation.

Latest Patents: Atsushi Shigeta holds several patents in the areas of robotics, artificial intelligence, and renewable energy, showcasing his versatility and forward-thinking approach to invention.

Career Highlights: With a career spanning over two decades, Atsushi Shigeta has worked with leading tech companies in Japan, spearheading projects that have revolutionized industries and improved the quality of life for many.

Collaborations: Throughout his career, Atsushi Shigeta has collaborated with top researchers, engineers, and scientists both locally and internationally, fostering a culture of innovation and knowledge-sharing.

Conclusion: Atsushi Shigeta's passion for innovation, coupled with his dedication to pushing the boundaries of technology, has solidified his reputation as a trailblazing inventor in Fujisawa and beyond.

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