Andrei Mikhailovich Yakunin

This inventor holds 36 USPTO granted patents and 18 published patent applications, plus 1 CIPO patent and 9 EPO patents, primarily in Lithographic Technology. Top assignee: Asml Netherlands B.v.. Active years: 2013-2026.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Andrei Mikhailovich Yakunin. Retrieved from https://idiyas.com/inventor/andrei-mikhailovich-yakunin

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 36 (Patent Applications = 18)

% Patents Active = 86.1

CIPO Patents = 1 (Patent Applications = 2)

EPO Patents = 9 (Patent Applications = 21)

Average Co-Inventor Count = 4.5

ph-index = 5

Forward Citations = 102(Granted Patents)

Location History:

Eindhoven, RU (2015)
Veldhoven, NL (2018)
Eindhoven, NL (2013 - 2019)
Mierlo, NL (2015 - 2019)

Company Filing History:

36 out of 5,075

Asml Netherlands B.v.

patents

Years Active: 2013-2026

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Areas of Expertise:

Lithographic Apparatus

Spectral Purity Filter

Radiation Source

Multilayer Mirror

Optical Element

Imprint Lithography

Grazing Incidence Reflectors

Device Manufacturing Method

Patterning Process

Pellicle

Carbon Nanotube Sheet

EUV Lithography

36 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12656696 - Contamination reduction system (2026-06-16),

2. 12372888 - Patterning device conditioning system and method (2025-07-29),

3. 10481510 - Graphene spectral purity filter (2019-11-19),

4. 10228615 - Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane (2019-03-12),

5. 10031422 - Lithographic apparatus (2018-07-24),

6. 10001709 - Lithographic apparatus, spectral purity filter and device manufacturing method (2018-06-19),

7. 9989863 - Lithographic system (2018-06-05),

8. 9989844 - Pellicle for reticle and multilayer mirror (2018-06-05),

9. 9986628 - Method and apparatus for generating radiation (2018-05-29),

10. 9897930 - Optical element comprising oriented carbon nanotube sheet and lithographic apparatus comprising such optical element (2018-02-20),

11. 9860966 - Radiation source (2018-01-02),

12. 9726989 - Spectral purity filter (2017-08-08),

13. 9632419 - Radiation source (2017-04-25),

14. 9606445 - Lithographic apparatus and method of manufacturing a device (2017-03-28),

15. 9594306 - Lithographic apparatus, spectral purity filter and device manufacturing method (2017-03-14),

Title: Pioneering Inventor: Andrei Mikhailovich Yakunin

Introduction: Andrei Mikhailovich Yakunin, a visionary inventor based in Eindhoven, NL, has made significant contributions to technological advancement with a total of 34 patents to his name. His innovative spirit and dedication to excellence have positioned him at the forefront of cutting-edge inventions.

Latest Patents: Yakunin's latest patents showcase his expertise in the field of advanced technology. One of his recent inventions includes the Graphene spectral purity filter, a groundbreaking pellicle incorporating graphene for EUV reticles. Additionally, he has developed membranes for use in lithographic apparatus, which are transmissive to EUV radiation and designed for enhanced performance in the semiconductor industry.

Career Highlights: Yakunin's career is highlighted by his tenure at ASML Netherlands B.V., a leading technology company driving innovation in the semiconductor industry. His role at ASML has allowed him to spearhead projects that push the boundaries of technology, enabling advancements in lithography and semiconductor manufacturing.

Collaborations: Throughout his career, Yakunin has collaborated with esteemed colleagues such as Vadim Yevgenyevich Banine and Erik Roelof Loopstra. Together, they have worked on cutting-edge projects that have garnered international recognition for their innovative solutions.

Conclusion: Andrei Mikhailovich Yakunin's remarkable journey as an inventor is a testament to his passion for innovation and unwavering commitment to advancing technology. His patents and collaborations reflect his dedication to pushing the boundaries of what is possible in the ever-evolving landscape of technological progress. Yakunin's pioneering spirit continues to inspire future generations of inventors and innovators to pursue excellence in their endeavors.

Profile summary based on public USPTO records.