The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2017
Filed:
Aug. 23, 2012
Jan Bernard Plechelmus Van Schoot, Eindhoven, NL;
Vadim Yevgenyevich Banine, Deurne, NL;
Olav Waldemar Vladimir Frijns, Rosmalen, NL;
Hermanus Kreuwel, Schijndel, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Uwe Bruno Heini Stamm, Goettingen, DE;
Gerardus Hubertus Petrus Maria Swinkels, Eindhoven, NL;
Ivo Vanderhallen, Eindhoven, NL;
Andrei Mikhailovich Yakunin, Mierlo, NL;
Jan Bernard Plechelmus Van Schoot, Eindhoven, NL;
Vadim Yevgenyevich Banine, Deurne, NL;
Olav Waldemar Vladimir Frijns, Rosmalen, NL;
Hermanus Kreuwel, Schijndel, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Uwe Bruno Heini Stamm, Goettingen, DE;
Gerardus Hubertus Petrus Maria Swinkels, Eindhoven, NL;
Ivo Vanderhallen, Eindhoven, NL;
Andrei Mikhailovich Yakunin, Mierlo, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A radiation source having a fuel stream generator () that generates and directs a fuel stream () along a trajectory towards a plasma formation location (). A pre-pulse laser radiation assembly directs a first beam of laser radiation () at the fuel stream at the plasma formation location to generate a modified fuel target (). A main pulse laser radiation assembly directs a second beam of laser radiation () at the modified fuel target at the plasma formation location to generate a radiation generating plasma (). A collector () collects the radiation and directs it along an optical axis () of the radiation source. The first beam of laser radiation being directed toward the fuel stream substantially along the optical axis.