The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2018
Filed:
Sep. 29, 2016
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Andrei Mikhailovich Yakunin, Eindhoven, NL;
Vadim Yevgenyevich Banine, Deurne, NL;
Erik Roelof Loopstra, Eindhoven, NL;
Harmen Klaas Van Der Schoot, Vught, NL;
Lucas Henricus Johannes Stevens, Eindhoven, NL;
Maarten Van Kampen, Eindhoven, NL;
Assignee:
ASML NETHERLANDS B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G03F 1/64 (2012.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01); G02B 5/08 (2006.01); G02B 5/20 (2006.01); G02B 27/00 (2006.01); G03F 1/24 (2012.01); G03F 1/62 (2012.01); G21K 1/06 (2006.01); H01B 1/04 (2006.01); H01B 1/24 (2006.01); G03B 27/54 (2006.01); C01B 32/20 (2017.01);
U.S. Cl.
CPC ...
G03F 1/64 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); C01B 32/20 (2017.08); G02B 5/0816 (2013.01); G02B 5/0891 (2013.01); G02B 5/204 (2013.01); G02B 5/208 (2013.01); G02B 27/0006 (2013.01); G03B 27/54 (2013.01); G03F 1/24 (2013.01); G03F 1/62 (2013.01); G03F 7/702 (2013.01); G03F 7/70058 (2013.01); G03F 7/70916 (2013.01); G03F 7/70958 (2013.01); G03F 7/70983 (2013.01); G21K 1/062 (2013.01); H01B 1/04 (2013.01); H01B 1/24 (2013.01); G21K 2201/061 (2013.01);
Abstract
A pellicle that includes graphene is constructed and arranged for an EUV reticle. A multilayer mirror includes graphene as an outermost layer.