The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2018
Filed:
Jul. 22, 2009
Leonid Aizikovitch Sjmaenok, Vaals, NL;
Vadim Yevgenyevich Banine, Deurne, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Denis Alexandrovich Glushkov, Witten, DE;
Andrei Mikhailovich Yakunin, Mierlo, NL;
Leonid Aizikovitch Sjmaenok, Vaals, NL;
Vadim Yevgenyevich Banine, Deurne, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Denis Alexandrovich Glushkov, Witten, DE;
Andrei Mikhailovich Yakunin, Mierlo, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A lithographic apparatus includes an optical element that includes an oriented carbon nanotube sheet. The optical element has an element thickness in the range of about 20-500 nm and has a transmission for EUV radiation having a wavelength in the range of about 1-20 nm of at least about 20% under perpendicular irradiation with the EUV radiation.