The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2017
Filed:
Feb. 22, 2011
Wouter Anthon Soer, Nijmegen, NL;
Vadim Yevgenyevich Banine, Deurne, NL;
Erik Roelof Loopstra, Eindhoven, NL;
Andrei Mikhailovich Yakunin, Eindhoven, NL;
Martin Jacobus Johan Jak, Eindhoven, NL;
Wouter Anthon Soer, Nijmegen, NL;
Vadim Yevgenyevich Banine, Deurne, NL;
Erik Roelof Loopstra, Eindhoven, NL;
Andrei Mikhailovich Yakunin, Eindhoven, NL;
Martin Jacobus Johan Jak, Eindhoven, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A spectral purity filter includes a body of material, through which a plurality of apertures extend. The apertures are arranged to suppress radiation having a first wavelength and to allow at least a portion of radiation having a second wavelength to be transmitted through the apertures. The second wavelength of radiation is shorter than the first wavelength of radiation. The body of material is formed from a material having a bulk reflectance of substantially greater than or equal to 70% at the first wavelength of radiation. The material has a melting point above 1000° C.