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Weilburg, Germany

Vistec Semiconductor Systems Gmbh

Calculating rank

USPTO Granted Patents = 72

% Expired Patents = 37.5

EPO Patents = 1

Trademarks = 2

Forward Citations = 246

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63 inventors (with patents filed for the assignee):

Michael Heiden (18 out of 21 patents)

Klaus Rinn (10 out of 19 patents)

Albert Kreh (9 out of 13 patents)

4. Detlef Michelsson (8 out of 10 patents)

5. Henning Backhauss (8 out of 10 patents)

6. Hans-Artur Boesser (8 out of 8 patents)

7. Klaus-Dieter Adam (7 out of 8 patents)

8. Andreas Schaaf (4 out of 4 patents)

9. Lambert Danner (4 out of 14 patents)

10. Wolfgang Fricke (4 out of 5 patents)

11. Tillmann Ehrenberg (4 out of 4 patents)

12. Slawomir Czerkas (3 out of 5 patents)

13. Wolfgang Vollrath (2 out of 6 patents)

14. Matthias Slodowski (2 out of 6 patents)

15. Gert Weniger (2 out of 3 patents)

Core Competencies:

Wafer Inspection

Optical Measurement

Defect Detection

Calibration Methods

Coordinate Measuring Machine

Image Processing

Measurement Accuracy

Surface Inspection

Substrate Topology

Illumination Techniques

Macrodefect Detection

Thin-Layer Metrology

72 patents: Sort by Forward Citations

1. 8390927 - Element for homogenizing the illumination with simultaneous setting of the polarization degree (2013-03-05),

2. 8351049 - Interferometric device for position measurement and coordinate measuring machine (2013-01-08),

3. 8264534 - Method and apparatus for processing the image data of the surface of a wafer recorded by at least one camera (2012-09-11),

4. 8248618 - Method for determining positions of structures on a mask (2012-08-21),

5. 8200004 - Method for inspecting a surface of a wafer with regions of different detection sensitivity (2012-06-12),

6. 8200003 - Method for the optical inspection and visualization of optical measuring values obtained from disk-like objects (2012-06-12),

7. 8154718 - Apparatus and method for inspecting micro-structured devices on a semiconductor substrate (2012-04-10),

8. 8154595 - Device and method for automatic detection of incorrect measurements by means of quality factors (2012-04-10),

9. 8149383 - Method for determining the systematic error in the measurement of positions of edges of structures on a substrate resulting from the substrate topology (2012-04-03),

10. 8125653 - Apparatus and method for the determination of the position of a disk-shaped object (2012-02-28),

11. 8115808 - Coordinate measuring machine and method for calibrating the coordinate measuring machine (2012-02-14),

12. 8102541 - Apparatus and method for measuring structures on a mask and or for calculating structures in a photoresist resulting from the structures (2012-01-24),

13. 8090185 - Method for optical inspection, detection and visualization of defects on disk-shaped objects (2012-01-03),

14. 8089622 - Device and method for evaluating defects in the edge area of a wafer and use of the device in inspection system for wafers (2012-01-03),

15. 8087799 - Illumination means and inspection means having an illumination means (2012-01-03),

Company Overview

Vistec Semiconductor Systems GmbH, based in Weilburg, Germany, specializes in advanced wafer inspection technologies essential for semiconductor manufacturing. The company focuses on optical measurement techniques, defect detection, and calibration methods, ensuring high measurement accuracy and surface inspection capabilities. Vistec's innovations support the semiconductor industry by enhancing the reliability and performance of manufacturing processes, contributing to the development of cutting-edge electronic devices.

Profile summary synthesized from public USPTO records and patent filings.

Company Badge

USPTO Data Jan 1 1976 - Oct 27 2026

72 Patents

#1 in Weilburg

#798 in Germany

#10,400 in the World

Weilburg, Germany

Vistec Semiconductor Systems Gmbh

Forward Citations = 246

63 inventors:

Michael Heiden (18 out of 21 patents)

Klaus Rinn (10 out of 19 patents)

Albert Kreh (9 out of 13 patents)

4. Detlef Michelsson (8 out of 10 patents)

5. Henning Backhauss (8 out of 10 patents)

IDiyas Innovation Intelligence. (2026). Company Patent Portfolio: Vistec Semiconductor Systems Gmbh. Retrieved from https://idiyas.com/company/vistec-semiconductor-systems

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]

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