The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2012
Filed:
Dec. 15, 2008
Applicants:
Ralf Friedrich, Giessen, DE;
Daniel Skiera, Langgoens, DE;
Inventors:
Ralf Friedrich, Giessen, DE;
Daniel Skiera, Langgoens, DE;
Assignee:
Vistec Semiconductor Systems GmbH, Weilburg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/36 (2006.01); G01N 21/88 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for optical inspection, detection and visualization of defects () on wafers () is disclosed, wherein at least one camera () acquires images of at least one portion () of the wafer () relative to a reference point () of the wafer (), and the Cartesian coordinates of the image data associated with the at least one portion () of the wafer () are transformed into polar coordinates.