The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 08, 2013
Filed:
Jul. 07, 2009
Hans-artur Boesser, Breidenbach, DE;
Siegfried Peter Kluge, Fronhausen, DE;
Joerg Lenz, Biebertal, DE;
Gerhard Joseph Nickel, Wetzlar, DE;
Hans-Artur Boesser, Breidenbach, DE;
Siegfried Peter Kluge, Fronhausen, DE;
Joerg Lenz, Biebertal, DE;
Gerhard Joseph Nickel, Wetzlar, DE;
Vistec Semiconductor Systems GmbH, Weilburg, DE;
Abstract
An interferometric device for position measurement of an element moveable in a plane is disclosed. A laser light source measures the position of the moveable element and emits the required measuring light. A beam splitter splits the measuring light into a first partial beam path and a second partial beam path, which each impinge on a reflecting surface of the moveable element via an interferometer. Herein, at least the beam splitter, which splits the measuring light into a first partial beam path and a second partial beam path, and the beam splitter, which directs the third partial beam path onto an etalon via an interferometer, have a respective beam trap associated with them, which traps the light returning from the respective interferometers.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile