The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2012
Filed:
Jan. 19, 2010
Klaus Rinn, Heuchelheim, DE;
Andreas Schaaf, Mittenaar-Bicken, DE;
Andre Schepp, Fermwald, DE;
Vistec Semiconductor Systems GmbH, Weilburg, DE;
Abstract
A method for determining the positions of structures () on a mask () is disclosed. The method is implemented in a metrology tool () comprising a measurement table () which is movable in X-coordinate direction and Y-coordinate direction. A first intensity profile (I) is recorded along a first measurement direction (MR), which is parallel to the X-coordinate direction. A second intensity profile (I) is recorded along a second measurement direction (MR), which is parallel to the Y-coordinate direction. A two-dimensional position of a centre of gravity (S) with respect to the coordinate system of the metrology tool () is determined from the first intensity profile (I) and the second intensity profile (I).