Jena, Germany

Matthias Slodowski


 

Average Co-Inventor Count = 2.3

ph-index = 2

Forward Citations = 51(Granted Patents)


Company Filing History:


Years Active: 2002-2012

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6 patents (USPTO):Explore Patents

Title: Matthias Slodowski: Innovator in Semiconductor Technology

Introduction

Matthias Slodowski is a prominent inventor based in Jena, Germany. He has made significant contributions to the field of semiconductor technology, holding a total of 6 patents. His work primarily focuses on high-resolution lithography and thin-layer metrology, which are crucial for advancements in the semiconductor industry.

Latest Patents

One of his latest patents is an "Arrangement for the illumination of a substrate with a plurality of individually shaped particle beams for high-resolution lithography of structure patterns." This invention aims to provide a novel method for illuminating substrates using controllable particle beams, enhancing the resolution and throughput in semiconductor manufacturing. Another notable patent is the "Apparatus and method for thin-layer metrology." This invention includes a measurement unit for thin-layer micrometrology and macrometrology, allowing for efficient examination of semiconductor substrates.

Career Highlights

Throughout his career, Matthias has worked with leading companies in the semiconductor field, including Leica Microsystems Jena GmbH and Vistec Semiconductor Systems Jena GmbH. His expertise and innovative approaches have positioned him as a key figure in the development of advanced semiconductor technologies.

Collaborations

Matthias has collaborated with notable professionals in his field, including Joachim Wienecke and Kuno Backhaus. These collaborations have further enriched his work and contributed to the success of his inventions.

Conclusion

Matthias Slodowski's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor. His innovative solutions continue to impact the industry positively.

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