The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2008
Filed:
Feb. 13, 2004
Matthias Slodowski, Jena, DE;
Matthias Slodowski, Jena, DE;
Vistec Semiconductor Systems Jena GmbH, Jena, DE;
Abstract
An apparatus () and a method for thin-layer metrology of semiconductor substrates () are disclosed. The semiconductor substrates () are delivered or transported to the apparatus () by means of at least one cassette element. A measurement unit () for thin-layer micrometrology is provided in the apparatus (), the semiconductor substrates being conveyed by means of a transport mechanism () from the cassette element () to the measurement unit () for thin-layer micrometrology. A measurement unit () for thin-layer macrometrology is provided in the region of the transport mechanism () after the cassette element (). By means of the measurement unit () for thin-layer macrometrology, measurement locations () on the semiconductor substrate that require more detailed examination in the measurement unit () for thin-layer micrometrology can rapidly be identified.