The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2012
Filed:
Sep. 09, 2009
Applicants:
Gert Weniger, Jena, DE;
Ulrich Pohlmann, Jena, DE;
Frank Rennicke, Grosspuerschuetz, DE;
Inventors:
Assignee:
Vistec Semiconductor Systems Jena GmbH, Jena, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/14 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention relates to an apparatus for the determination of the position of a disc-shaped object, particularly of a wafer (). Thereby, a mount () for supporting the sensor device () is provided on a movable carrier ().