The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2012
Filed:
Jan. 31, 2008
Hans-artur Boesser, Breidenbach, DE;
Michael Heiden, Wolfersheim, DE;
Klaus-dieter Adam, Jena, DE;
Vistec Semiconductor Systems Jena GmbH, Jena, DE;
Abstract
What is disclosed is a device () for automatic detection of a possible incorrect measurement, wherein the device () comprises at least one reflected light illumination apparatus () and/or a transmitted light illumination apparatus () and at least one imaging optical system () and one detector () of a camera () for imaging structures () on a substrate (), wherein a first program portion () is linked to the detector () of the camera (), said detector being provided for determining the position and/or dimension of the structure () on the substrate (), wherein the device () determines and records a plurality of measurement variables M, jε{1, . . . , L}, from which at least one variable G can be determined, wherein a second program portion () is linked to the detector () of the camera (), said program portion calculating an analysis of the measurement variables Mwith regard to a possible incorrect measurement. Also disclosed is a method for automatic detection of a possible incorrect measurement wherein an analysis of the measurement variables Mwith regard to a possible incorrect measurement is calculated with a second program portion () which is linked to the detector () of the camera ().