Wetzlar, Germany

Henning Backhauss


Average Co-Inventor Count = 2.5

ph-index = 6

Forward Citations = 56(Granted Patents)


Company Filing History:


Years Active: 2007-2013

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10 patents (USPTO):Explore Patents

Title: Biography of Henning Backhauss

Introduction

Henning Backhauss is a notable inventor based in Wetzlar, Germany. He has made significant contributions to the field of optical inspection technology, particularly in the semiconductor industry. With a total of 10 patents to his name, Backhauss has established himself as a key figure in innovation.

Latest Patents

Among his latest patents is an "Apparatus for the optical inspection of wafers." This invention includes an assembly unit that carries optical elements for both bright field and dark field illumination. The design ensures that all illumination and detection paths are telecentric, enhancing the accuracy of the inspection process. Another significant patent is the "Method of detecting incomplete edge bead removal from a disk-like object." This method involves imaging the peripheral area of a reference object and defining marks to facilitate the inspection of similar disk-like objects.

Career Highlights

Henning Backhauss has worked with prominent companies in the semiconductor sector, including Vistec Semiconductor Systems GmbH and Leica Microsystems Semiconductor GmbH. His experience in these organizations has contributed to his expertise in optical inspection technologies.

Collaborations

Throughout his career, Backhauss has collaborated with notable professionals such as Albert Kreh and Detlef Michelsson. These collaborations have further enriched his work and innovations in the field.

Conclusion

Henning Backhauss continues to be a

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