The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2013
Filed:
Mar. 03, 2010
Kurt Hahn, Giessen, DE;
Roland Hedrich, Ehringshausen, DE;
Gerhard Hoppen, Wetzlar, DE;
Lambert Danner, Wetzlar, DE;
Albert Kreh, Solms, DE;
Wolfgang Vollrath, Burbach, DE;
Alexander Büttner, Weilburg, DE;
Christof Krampe-zadler, Castrop-Rauxel, DE;
Henning Backhauss, Wetzlar, DE;
Hermann Bittner, Limburg, DE;
Kurt Hahn, Giessen, DE;
Roland Hedrich, Ehringshausen, DE;
Gerhard Hoppen, Wetzlar, DE;
Lambert Danner, Wetzlar, DE;
Albert Kreh, Solms, DE;
Wolfgang Vollrath, Burbach, DE;
Alexander Büttner, Weilburg, DE;
Christof Krampe-Zadler, Castrop-Rauxel, DE;
Henning Backhauss, Wetzlar, DE;
Hermann Bittner, Limburg, DE;
Kla-Tencor Mie GmbH, Weilburg, DE;
Abstract
An apparatus () for the optical inspection of wafers is disclosed, which comprises an assembly unit () which carries optical elements () of at least one illumination path () for a bright field illumination and optical elements () of at least one illumination path () for a dark field illumination. The assembly unit () furthermore carries plural optical elements () of at least one detection path (). An imaging optical element () of the at least one illumination path () for the bright field illumination (), imaging optical elements () of the at least one illumination path for the dark field illumination, and imaging optical elements () of the at least one detection path () are designed in such a way that all illumination paths () and all detection paths () are telecentric.