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% Expired Patents = 28.6

Forward Citations = 26

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24 inventors (with patents filed for the assignee):

Michael Heiden (2 out of 21 patents)

Lambert Danner (2 out of 14 patents)

Alexander Buettner (1 out of 10 patents)

4. Frank Laske (1 out of 19 patents)

5. Eric Cotte (1 out of 3 patents)

6. Wolfgang Vollrath (1 out of 6 patents)

7. Wolfgang Sulik (1 out of 2 patents)

8. Detlef Michelsson (1 out of 10 patents)

9. Daniel Skiera (1 out of 2 patents)

10. Kurt Hahn (1 out of 2 patents)

11. Roland Hedrich (1 out of 5 patents)

12. Gerhard Hoppen (1 out of 5 patents)

13. Albert Kreh (1 out of 13 patents)

14. Alexander Büttner (1 out of 1 patent)

15. Christof Krampe-Zadler (1 out of 2 patents)

7 patents: Sort by Forward Citations

1. 9091525 - Method for focusing an object plane and optical assembly (2015-07-28),

2. 8705837 - Method for inspection and detection of defects on surfaces of disc-shaped objects and computer system with a software product for carrying out the method (2014-04-22),

3. 8582113 - Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the device (2013-11-12),

4. 8451440 - Apparatus for the optical inspection of wafers (2013-05-28),

5. 8352886 - Method for the reproducible determination of the position of structures on a mask with a pellicle frame (2013-01-08),

6. 8305587 - Apparatus for the optical inspection of wafers (2012-11-06),

7. 7623698 - Method of learning a knowledge-based database used in automatic defect classification (2009-11-24),

KLA-Tencor Mie GmbH is a leading provider of process control and yield management solutions for the semiconductor and related industries. Their advanced inspection and metrology systems help customers achieve high productivity and maintain high-quality standards in their manufacturing processes. With a global presence and innovative technology, KLA-Tencor Mie GmbH is a trusted partner for companies looking to improve their semiconductor manufacturing operations.

Profile summary based on public USPTO records.

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USPTO Data Jan 1 1976 - Sep 29 2026

7 Patents

#3 in Weilburg

#4,855 in Germany

Weilburg, Germany

Kla-Tencor Mie Gmbh