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Forward Citations = 24

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24 inventors (with patents filed for the assignee):

Michael Heiden (2 out of 21 patents)

Lambert Danner (2 out of 14 patents)

Alexander Buettner (1 out of 9 patents)

4. Frank Laske (1 out of 18 patents)

5. Eric Cotte (1 out of 3 patents)

6. Wolfgang Vollrath (1 out of 6 patents)

7. Wolfgang Sulik (1 out of 2 patents)

8. Detlef Michelsson (1 out of 10 patents)

9. Daniel Skiera (1 out of 2 patents)

10. Kurt Hahn (1 out of 2 patents)

11. Roland Hedrich (1 out of 5 patents)

12. Gerhard Hoppen (1 out of 5 patents)

13. Albert Kreh (1 out of 13 patents)

14. Alexander Büttner (1 out of 1 patent)

15. Christof Krampe-Zadler (1 out of 2 patents)

7 patents: Sort by Forward Citations

1. 9091525 - Method for focusing an object plane and optical assembly (2015-07-28),

2. 8705837 - Method for inspection and detection of defects on surfaces of disc-shaped objects and computer system with a software product for carrying out the method (2014-04-22),

3. 8582113 - Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the device (2013-11-12),

4. 8451440 - Apparatus for the optical inspection of wafers (2013-05-28),

5. 8352886 - Method for the reproducible determination of the position of structures on a mask with a pellicle frame (2013-01-08),

6. 8305587 - Apparatus for the optical inspection of wafers (2012-11-06),

7. 7623698 - Method of learning a knowledge-based database used in automatic defect classification (2009-11-24),

KLA-Tencor Mie GmbH is a leading provider of process control and yield management solutions for the semiconductor and related industries. Their advanced inspection and metrology systems help customers achieve high productivity and maintain high-quality standards in their manufacturing processes. With a global presence and innovative technology, KLA-Tencor Mie GmbH is a trusted partner for companies looking to improve their semiconductor manufacturing operations.

This text is generated by artificial intelligence and may not be accurate.

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USPTO Data Jan 1 1976 - Dec 23 2025

7 Patents

#3 in Weilburg

#4,793 in Germany

Weilburg, Germany

Kla-tencor Mie Gmbh