The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2014
Filed:
Nov. 10, 2011
Detlef Michelsson, Wetzlar-Naunheim, DE;
Daniel Skiera, Langgoens, DE;
Detlef Michelsson, Wetzlar-Naunheim, DE;
Daniel Skiera, Langgoens, DE;
KLA-Tencor MIE GmbH, Weilburg, DE;
Abstract
An image () of a disc-shaped object () is recorded, wherein the entire surface () is captured with a plurality of fields (). A difference image () is formed, by subtracting a reference from each field () of the surface () of the disc-shaped object (), and subject to a color transformation, wherein by a suitable choice of transformation signals in one channel are maximized, while at the same time undesired variations, caused by production, of the fields () are moved to a different channel. That combination of transformation and detection channel is chosen for which the largest number of pixels of a field () with the defect to be found are located outside the spread of the pixels of the respective field () on the surface () of the respective disc-shaped object () from production and provide the largest signals for the defect.