Company Filing History:
Years Active: 2009-2015
Title: Wolfgang Sulik: Innovator in Optical Technologies
Introduction
Wolfgang Sulik is a notable inventor based in Asslar, Germany. He has made significant contributions to the field of optical technologies, holding 2 patents that showcase his innovative approaches to focusing and inspecting optical systems.
Latest Patents
Sulik's latest patents include a "Method for focusing an object plane" and an "Apparatus and method of inspecting the surface of a wafer." The first patent describes a method for focusing an object plane through an objective and an optical assembly. This method involves positioning a geometric reference structure in a plane conjugate to a field plane of the objective, which is then imaged onto the object plane. The geometric reference structure is illuminated with a light beam that encloses a non-zero angle with the normal direction of the conjugate plane. This setup allows for the determination of the focus position based on the signed distance between the object plane and the field plane. The optical assembly may serve as a metrology tool for measuring structures on masks, with the objective acting as the measurement objective.
The second patent outlines an apparatus for inspecting a wafer's surface. This apparatus includes an illumination device that illuminates an imaging area of the wafer with a broad-band spectrum. It also features an optical imaging device with a detector for polychromatic imaging, which incorporates a filter arrangement for selecting multiple narrow-band spectra. The method for inspecting the wafer's surface involves leveling the narrow-band spectra to a common intensity range and imaging them based on the illumination.
Career Highlights
Throughout his career, Wolfgang Sulik has worked with prominent companies in the semiconductor industry, including KLA-Tencor Mie GmbH and Vistec Semiconductor Systems GmbH. His experience in these organizations has contributed to his expertise in optical technologies and innovations.
Collaborations
Sulik has collaborated with notable professionals in his field, including Lambert Danner and Alexander Buettner. These collaborations have likely enriched his work and contributed to the advancements in optical technologies.
Conclusion
Wolfgang Sulik is a distinguished inventor whose work in optical technologies has led to significant advancements in the field. His patents reflect his innovative spirit and dedication to improving optical systems.