The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2007
Filed:
Nov. 02, 2004
Applicants:
Albert Kreh, Solms, DE;
Henning Backhauss, Wetzlar, DE;
Rene Schenck, Jena, DE;
Inventors:
Assignee:
Vistec Semiconductor Systems GmbH, Weilburg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A system for the detection of macrodefects is disclosed, the system being surrounded by a housing () and being subdivided into a first segment (), a second segment (), and a third segment (). Provided in the second segment () is a stage (), displaceable in the X direction and Y direction, on which a wafer () is placed. Located in the first segment () is an aspiration device () that directs aspirated air via an air guide () into the second segment (), the air guide () encompassing several air-directing panels () so that an air flow () is guided in parallel fashion over the wafer ().