Location History:
- Tokyo-To, JP (2012)
- Nirasaki, JP (2006 - 2019)
- Yamanashi, JP (2003 - 2023)
Company Filing History:
23 out of 10,295 
1 out of 13 
1 out of 1 Years Active: 2003-2025
Title: Innovations of Yasuhiko Kojima: Pioneering Substrate Processing Technologies
Introduction
Yasuhiko Kojima, a prominent inventor based in Nirasaki, Japan, has made significant contributions to the field of substrate processing with a total of 21 patents to his name. His innovative inventions focus on enhancing the efficiency and reliability of various processing apparatuses.
Latest Patents
Kojima's recent patents include a comprehensive range of techniques and devices. One notable invention is the "Substrate Processing Apparatus and Abnormality Detection Method." This apparatus features a stage equipped with an electrostatic chuck designed to attract a substrate, coupled with a heating system that maintains the stage at a target temperature. A key aspect of this invention is its ability to detect abnormalities in substrate attraction through fluctuations in power supplied to the heater.
Another significant patent is the "Film Forming Apparatus," which consists of a processing container and a substrate holder that maintains the substrate within the container. This invention includes a well-engineered target assembly that emits sputter particles and is equipped with a labyrinth-structured anti-deposition shield, ensuring optimal performance during the film formation process.
Career Highlights
Throughout his career, Yasuhiko Kojima has worked with renowned companies in the technology sector, notably Tokyo Electron Limited and Lintec Co., Ltd. His experience in these leading organizations has greatly contributed to his expertise in substrate processing technologies.
Collaborations
Kojima has collaborated with esteemed professionals in the field, including Naoki Yoshii and Tadahiro Ishizaka. These collaborations have not only enhanced his inventions but have also led to a plethora of advancements in substrate processing.
Conclusion
Yasuhiko Kojima's innovative spirit and dedication to enhancing substrate processing technologies have firmly established him as a noteworthy inventor. With 21 patents and numerous collaborations, Kojima continues to pave the way for advancements in the field, reflecting the vital role of innovation in driving technological progress.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.