The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2011
Filed:
Aug. 28, 2003
Hiroshi Kannan, Tokyo, JP;
Tadahiro Ishizaka, Yamanashi, JP;
Yasuhiko Kojima, Yamanashi, JP;
Yasuhiro Oshima, Yamanashi, JP;
Takashi Shigeoka, Yamanashi, JP;
Hiroshi Kannan, Tokyo, JP;
Tadahiro Ishizaka, Yamanashi, JP;
Yasuhiko Kojima, Yamanashi, JP;
Yasuhiro Oshima, Yamanashi, JP;
Takashi Shigeoka, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A substrate processing unit comprises a processing vessel for receiving a substrate, a cleaning gas supply system for supplying cleaning gas to the processing vessel so as to clean the interior of the processing vessel, an exhauster for exhausting the processing vessel, an operating state detector for detecting the operating state of the exhauster, and an end point detector for detecting the end point of the cleaning on the basis of the detection result from the operating state detector.