Location History:
- Chofu, JP (2002)
- Kanagawa-Ken, JP (2002)
- Tokyo-to, JP (2002)
- Nirasaki, JP (2002 - 2010)
- Yamanashi, JP (2011)
Company Filing History:
Years Active: 2002-2011
Title: The Innovative Contributions of Takashi Shigeoka
Introduction: Takashi Shigeoka, an accomplished inventor based in Nirasaki, Japan, has made significant strides in the realm of substrate processing technologies. With an impressive portfolio of 12 patents, his inventions contribute to optimizing processes within semiconductor manufacturing.
Latest Patents: Among Takashi's latest innovations are two notable patents. The first is a "Substrate Processing Unit," which encompasses a processing vessel designed to receive substrates along with a sophisticated cleaning gas supply system. This system not only cleans the interior of the processing vessel but also utilizes an operating state detector to monitor the exhauster’s condition. Additionally, it features an end point detector that assesses the completion of the cleaning process based on the detection results from the operating state detector.
The second patent, titled "Gas Switching Mechanism for Plasma Processing Apparatus," introduces a groundbreaking processing apparatus capable of alternating between the supply of a raw material gas and a reducing gas while maintaining continuous plasma formation. This system integrates an excitation device for the reducing gas, a switching mechanism to control gas flow between the process chamber and a bypass line, thus enhancing efficiency in plasma-assisted processes.
Career Highlights: Currently, Takashi is part of Tokyo Electron Limited, a leading entity in the semiconductor equipment industry. His work focuses on developing next-generation processing solutions that drive the advancement of semiconductor technologies.
Collaborations: Throughout his career, Takashi has collaborated with notable industry colleagues, including Takeshi Sakuma and Yicheng Li. Their teamwork underscores the importance of collaboration in driving innovation within the high-tech sector.
Conclusion: Takashi Shigeoka's contributions through his patents exemplify the spirit of innovation in semiconductor manufacturing. His work continues to pave the way for future advancements, demonstrating the invaluable role of inventors in the technological landscape. As he continues to work at Tokyo Electron Limited, his further endeavors are keenly awaited by industry stakeholders.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.