The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 22, 2002

Filed:

Mar. 16, 2000
Applicant:
Inventors:

Eisuke Morisaki, Kanagawa-ken, JP;

Masayuki Kitamura, Tokyo-to, JP;

Nobuaki Takahashi, Tokyo-to, JP;

Takashi Shigeoka, Tokyo-to, JP;

Assignee:

Tokyo Electron Limited, Tokyo-To, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01K 1/500 ; G01J 5/08 ; G01D 1/800 ; G02B 7/04 ;
U.S. Cl.
CPC ...
G01K 1/500 ; G01J 5/08 ; G01D 1/800 ; G02B 7/04 ;
Abstract

A virtual blackbody radiation system ( ) includes a light-emitting unit ( ) including an LED driven by a fixed current, a light-receiving unit ( ) including a sapphire rod, and an optical unit ( ) including lenses ( ) for converging light emitted by the light-emitting unit in a convergent light. A cylindrical member ( )included in the optical unit ( )can be moved along the optical axis by a servomotor ( ) included in a focus adjusting unit ( ) for positional adjustment. The focus of convergent light relative to the light-receiving unit ( ) can be adjusted by moving the lens ( ) disposed in the cylindrical member ( ) along the optical axis relative to the light-receiving unit ( ). The intensity of the convergent light on the light-receiving unit ( ) can be adjusted to the intensity of predetermined blackbody radiation. Thus, the virtual blackbody radiation system ( ) is able to obtain light of a desired intensity without changing the driving current for driving a light source; consequently, the life time of the light source can be extended and the stability of radiation can be improved.


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