The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2004
Filed:
Oct. 23, 2001
Applicant:
Inventor:
Takashi Shigeoka, Nirasaki, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/131 ;
U.S. Cl.
CPC ...
H01L 2/131 ;
Abstract
A lamp for a heat treatment apparatus that provides a rapid temperature rise without using a reflector. The lamp has at least one electrode part to which an electric power is supplied. A light-emitting part, connected to the electrode part, seals a filament for emitting light. A high-reflectance film is formed on an outer surface of a first portion of the light-emitting part so as to reflect light emitted from the filament. Reflected light exits from the light-emitting part through a second portion not having a film formed thereon. Accordingly, directivity of light exiting from the second portion of the light-emitting part is improved.