The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2019
Filed:
Aug. 28, 2014
Tokyo Electron Limited, Tokyo, JP;
Yasuhiko Kojima, Nirasaki, JP;
Hiroshi Sone, Nirasaki, JP;
Atsushi Gomi, Nirasaki, JP;
Kanto Nakamura, Nirasaki, JP;
Toru Kitada, Nirasaki, JP;
Yasunobu Suzuki, Nirasaki, JP;
Yusuke Suzuki, Beaverton, OR (US);
Koichi Takatsuki, Nirasaki, JP;
Tatsuo Hirasawa, Nirasaki, JP;
Keisuke Sato, Nirasaki, JP;
Chiaki Yasumuro, Nirasaki, JP;
Atsushi Shimada, Nirasaki, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A deposition device according to one embodiment includes a processing container. A mounting table is installed inside the processing container, and a metal target is installed above the mounting table. Further, a head is configured to inject an oxidizing gas toward the mounting table. This head is configured to move between a first region that is defined between the metal target and a mounting region where a target object is mounted on the mounting table and a second region spaced apart from a space defined between the metal target and the mounting region.