Nirasaki, Japan

Atsushi Shimada



Average Co-Inventor Count = 4.2

ph-index = 1

Forward Citations = 5(Granted Patents)


Location History:

  • Nirasaki, JP (2016 - 2019)
  • Yamanashi, JP (2016 - 2019)

Company Filing History:


Years Active: 2016-2024

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5 patents (USPTO):

Title: **Innovative Contributions of Atsushi Shimada in Film Forming Technology**

Introduction

Atsushi Shimada, an accomplished inventor hailing from Nirasaki, Japan, has made significant strides in the field of film forming technology. With a portfolio of five patents to his name, Shimada's innovations focus on improving processes essential for various applications in electronics and material science.

Latest Patents

Among his latest patents is a groundbreaking **Film Forming Apparatus and Film Forming Method**. This invention features a processing container equipped with a substrate holder and a cathode unit that facilitates the deposition of materials onto substrates through magnetron sputtering. The device is designed for precision, incorporating a gas introducing mechanism that allows for the introduction of plasma-generating gases. The cathode unit's innovative design includes a target, a power supply, and a magnet assembly that enhances the sputtering process, enabling better control over the deposition of materials.

Another notable patent is the **Deposition Device and Deposition Method**, which presents a unique design consisting of a processing container, a mounting table, and a movable head that injects oxidizing gas towards the mounting table. This apparatus is engineered to optimize the deposition process, enhancing efficiency and effectiveness in creating thin films.

Career Highlights

Atsushi Shimada is associated with **Tokyo Electron Limited**, a leading company in the semiconductor and electronics industries. Throughout his career, he has been at the forefront of technological advancements, contributing to the development of critical manufacturing tools and equipment that serve a wide array of applications.

Collaborations

Shimada has collaborated with talented individuals in his field, including prominent coworkers such as Tatsuo Hirasawa and Shinji Furukawa. These collaborations have resulted in breakthrough innovations and have significantly impacted the technologies utilized in film formation and material deposition.

Conclusion

Atsushi Shimada's contributions to the field of film forming technology through his inventive patents highlight his role as a pioneer in the industry. His work at Tokyo Electron Limited, coupled with his collaborations, showcases a commitment to advancements that not only enhances manufacturing processes but also paves the way for future innovations. As technology continues to evolve, the impact of Shimada's inventions will undoubtedly play a crucial role in shaping the future of electronics and material sciences.

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