This inventor holds 36 USPTO granted patents and 2 published patent applications and 7 EPO patents, primarily in Extreme Ultraviolet Technology. Top assignees: Kla Tencor Corporation, Kla Corporation, Kla-Tencor Technologies Corporation. Active years: 2007-2025.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
22 out of 1,787 
9 out of 620 
4 out of 641 
Years Active: 2007-2025
Areas of Expertise:
Title: Innovations of Rudy Flores Garcia: Pioneering Contamination Mitigation in Extreme Ultraviolet Inspection Systems
Introduction
Rudy Flores Garcia, based in Union City, California, is an esteemed inventor with an impressive portfolio comprising 35 patents. His contributions to the field of technology, particularly in contamination mitigation methods and laser produced plasma light sources, have made significant advancements in inspection systems.
Latest Patents
Among his latest innovations, Rudy has developed a counterflow gas nozzle designed specifically for contamination mitigation in extreme ultraviolet inspection systems. This system incorporates methods to reduce the presence of contaminants within critical components through a counterflow of purge gas directed opposite to the illumination direction, enhancing the efficiency and accuracy of inspection systems.
Another notable patent involves a laser produced plasma light source, which features a target material, such as xenon, coated on the outer surface of a cylindrically symmetric drum. This innovation includes advanced bearing systems for the drum that prevent contaminant material and bearing gas from leaking into the LPP chamber. Additionally, Rudy's inventions encompass systems for cooling the drum and preparing the target material surface to enhance performance.
Career Highlights
Rudy has had a remarkable career, contributing his innovative skills to leading technology firms such as Kla Tencor Corporation and Kla Corporation. His extensive experience in these organizations has facilitated his development of cutting-edge technologies that have impacted various industries.
Collaborations
Throughout his career, Rudy has collaborated with talented professionals, including Gildardo Rios Delgado and Frances Hill, utilizing teamwork to push the boundaries of innovation. Their collective efforts have led to the exploration and creation of pioneering solutions to complex technological challenges.
Conclusion
Rudy Flores Garcia's innovative spirit and dedication to advancing technology through his patents demonstrate his pivotal role in the scientific community. Through diligent work and collaboration, he continues to set new standards in contamination mitigation and laser plasma technologies, shaping the future of inspection systems and beyond.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile