The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2020
Filed:
Oct. 02, 2018
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Katerina Ioakeimidi, San Francisco, CA (US);
Gildardo R. Delgado, Livermore, CA (US);
Frances Hill, Sunnyvale, CA (US);
Michael E. Romero, San Jose, CA (US);
Rudy F. Garcia, Union City, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/073 (2006.01); H01J 37/26 (2006.01); G02B 27/09 (2006.01); H01J 40/06 (2006.01); H01J 40/18 (2006.01); H01J 1/304 (2006.01); H01J 19/24 (2006.01); H01J 37/06 (2006.01); H01J 37/28 (2006.01); H01J 1/34 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01J 37/073 (2013.01); G02B 27/0927 (2013.01); H01J 1/3044 (2013.01); H01J 19/24 (2013.01); H01J 37/06 (2013.01); H01J 37/26 (2013.01); H01J 37/28 (2013.01); H01J 40/06 (2013.01); H01J 40/18 (2013.01); H01J 1/34 (2013.01); H01J 2201/308 (2013.01); H01J 2201/3048 (2013.01); H01J 2201/30411 (2013.01); H01J 2201/30449 (2013.01); H01J 2201/3423 (2013.01); H01J 2201/3425 (2013.01); H01J 2201/3426 (2013.01); H01J 2237/06333 (2013.01); H01J 2237/24521 (2013.01); H01J 2237/24592 (2013.01); H01J 2237/2817 (2013.01); H01L 21/67288 (2013.01);
Abstract
A flat top laser beam is used to generate an electron beam with a photocathode that can include an alkali halide. The flat top profile can be generated using an optical array. The laser beam can be split into multiple laser beams or beamlets, each of which can have the flat top profile. A phosphor screen can be imaged to determine space charge effects or electron energy of the electron beam.