The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2020
Filed:
Jan. 16, 2019
Kla-tencor Corporation, Milpitas, CA (US);
Gildardo Delgado, Livermore, CA (US);
Katerina Ioakeimidi, Sunnyvale, CA (US);
Frances A. Hill, Sunnyvale, CA (US);
Rudy F. Garcia, Union City, CA (US);
Mike Romero, San Jose, CA (US);
Zefram Marks, Gilroy, CA (US);
Gary V. Lopez Lopez, Milpitas, CA (US);
KLA Corporation, Milpitas, CA (US);
Abstract
A high-brightness electron beam source is disclosed. The electron beam source may include a broadband illumination source configured to generate broadband illumination. A tunable spectral filter may be configured to filter the broadband illumination to provide filtered illumination having an excitation spectrum. The electron beam source may further include a photocathode configured to emit one or more electron beams in response to the filtered illumination, wherein emission from the photocathode is adjustable based on the excitation spectrum of the filtered illumination from the tunable spectral filter.