The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2020
Filed:
May. 22, 2019
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Frances Hill, Sunnyvale, CA (US);
Gildardo R. Delgado, Livermore, CA (US);
Rudy F. Garcia, Union City, CA (US);
Gary V. Lopez Lopez, Sunnyvale, CA (US);
Michael E. Romero, San Jose, CA (US);
Katerina Ioakeimidi, San Francisco, CA (US);
Zefram Marks, Fremont, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 1/16 (2006.01); H01J 1/304 (2006.01); H01J 37/073 (2006.01);
U.S. Cl.
CPC ...
H01J 1/3044 (2013.01); H01J 37/073 (2013.01); H01J 2201/3048 (2013.01); H01J 2201/30411 (2013.01); H01J 2201/30426 (2013.01); H01J 2201/30449 (2013.01); H01J 2237/06341 (2013.01);
Abstract
An emitter with a diameter of 100 nm or less is used with a protective cap layer and a diffusion barrier between the emitter and the protective cap layer. The protective cap layer is disposed on the exterior surface of the emitter. The protective cap layer includes molybdenum or iridium. The emitter can generate an electron beam. The emitter can be pulsed.