The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2020
Filed:
Aug. 21, 2018
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Gildardo R. Delgado, Livermore, CA (US);
Katerina Ioakeimidi, San Francisco, CA (US);
Rudy Garcia, Union City, CA (US);
Zefram Marks, Fremont, CA (US);
Gary V. Lopez Lopez, Sunnyvale, CA (US);
Frances A. Hill, Sunnyvale, CA (US);
Michael E. Romero, San Jose, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/00 (2006.01); H01J 37/073 (2006.01); H01J 37/22 (2006.01); G01N 23/20058 (2018.01); G02B 5/18 (2006.01); G02B 3/00 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/073 (2013.01); G01N 23/20058 (2013.01); H01J 37/22 (2013.01); G01N 2223/6116 (2013.01); G02B 3/0006 (2013.01); G02B 5/1866 (2013.01); H01J 37/28 (2013.01);
Abstract
The system includes a photocathode electron source, diffractive optical element, and a microlens array to focus the beamlets. A source directs a radiation beam to the diffractive optical element, which produces a beamlet array to be used in combination with a photocathode surface to generate an array of electron beams from the beamlets.