The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2020
Filed:
Jan. 28, 2019
Kla-tencor Corporation, Milpitas, CA (US);
Gildardo R. Delgado, Livermore, CA (US);
Katerina Ioakeimidi, San Francisco, CA (US);
Frances Hill, Sunnyvale, CA (US);
Gary V. Lopez Lopez, Sunnyvale, CA (US);
Rudy F. Garcia, Union City, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A photocathode structure, which can include one or more of CsTe, CsKTe, CsI, CsBr, GaAs, GaN, InSb, CsKSb, or a metal, has a protective film on an exterior surface. The protective film includes one or more of ruthenium, nickel, platinum, chromium, copper, gold, silver, aluminum, or an alloy thereof. The protective film can have a thickness from 1 nm to 10 nm. The photocathode structure can be used in an electron beam tool like a scanning electron microscope.