The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2020
Filed:
Dec. 05, 2019
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Katerina Ioakeimidi, San Francisco, CA (US);
Gildardo R. Delgado, Livermore, CA (US);
Michael E. Romero, San Jose, CA (US);
Frances Hill, Sunnyvale, CA (US);
Rudy F. Garcia, Union City, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/073 (2006.01); H01J 37/26 (2006.01); G02B 27/09 (2006.01); H01J 40/06 (2006.01); H01J 40/18 (2006.01); H01J 1/304 (2006.01); H01J 19/24 (2006.01); H01J 37/06 (2006.01); H01J 37/28 (2006.01); H01J 1/34 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01J 37/073 (2013.01); G02B 27/0927 (2013.01); H01J 1/3044 (2013.01); H01J 19/24 (2013.01); H01J 37/06 (2013.01); H01J 37/26 (2013.01); H01J 37/28 (2013.01); H01J 40/06 (2013.01); H01J 40/18 (2013.01); H01J 1/34 (2013.01); H01J 2201/308 (2013.01); H01J 2201/3048 (2013.01); H01J 2201/30411 (2013.01); H01J 2201/30449 (2013.01); H01J 2201/3423 (2013.01); H01J 2201/3425 (2013.01); H01J 2201/3426 (2013.01); H01J 2237/06333 (2013.01); H01J 2237/24521 (2013.01); H01J 2237/24592 (2013.01); H01J 2237/2817 (2013.01); H01L 21/67288 (2013.01);
Abstract
A photocathode can include a body fabricated of a wide bandgap semiconductor material, a metal layer, and an alkali halide photocathode emitter. The body may have a thickness of less than 100 nm and the alkali halide photocathode may have a thickness less than 10 nm. The photocathode can be illuminated with a dual wavelength scheme.