Pramod Subramonium

Title: Innovative Contributions of Pramod Subramonium

Introduction

Pramod Subramonium, based in Beaverton, Oregon, is a notable inventor with an impressive portfolio of 33 patents. His work in the field of semiconductor technology demonstrates significant advancements, particularly in the integration of 3D NAND technology. This article delves into his latest patents, career highlights, and notable collaborations.

Latest Patents

Pramod's recent innovations include two pivotal patents focused on enhancing semiconductor fabrication processes.

1. **Nitride Films with Improved Etch Selectivity for 3D NAND Integration** - This patent details a method for depositing a nitride layer over an oxide layer to create an oxide-nitride stack. The process utilizes an inert gas in a plasma enhanced chemical vapor deposition (PECVD) reactor, which supports a substrate with an oxide layer. By applying power to an electrode to strike a plasma and flowing specific reactant gases, including ammonia, nitrogen, silane, and an oxidizer, a control over the nitride layer's thickness is achieved.

2. **Depositing a Carbon Hardmask by High Power Pulsed Low Frequency RF** - This invention addresses methods and related apparatus for depositing an ashable hard mask on a substrate by pulsing low frequency radio frequency (RF) power at high levels. This technique aims to enhance the selectivity and reduce stress on the hard mask, allowing for efficient etching of underlying layers.

Career Highlights

Throughout his career, Pramod Subramonium has contributed significantly to the semiconductor industry. He has worked with renowned companies such as Novellus Systems Incorporated and Lam Research Corporation. His expertise and innovative approach have placed him on the forefront of technological advancements in semiconductor manufacturing.

Collaborations

Pramod has collaborated with several prominent individuals in his field, including notable coworkers Jon Henri and Mandyam Sriram. These collaborations have fostered an environment of innovation, leading to groundbreaking developments in semiconductor technology.

Conclusion

Pramod Subramonium’s contributions to innovations in semiconductor processes exemplify his commitment to advancing technology. With 33 patents to his name and impactful collaborations, he continues to be a significant player in shaping the future of the semiconductor industry. His recent patents further reinforce his status as a leading inventor in this highly specialized area.