Average Co-Inventor Count = 5.16
ph-index = 16
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Novellus Systems Incorporated (27 from 993 patents)
2. Lam Research Corporation (7 from 3,768 patents)
34 patents:
1. 12385138 - Plasma-enhanced deposition of film stacks
2. 12040180 - Nitride films with improved etch selectivity for 3D NAND integration
3. 11837441 - Depositing a carbon hardmask by high power pulsed low frequency RF
4. 11746420 - PECVD apparatus for in-situ deposition of film stacks
5. 10541117 - Systems and methods for tilting a wafer for achieving deposition uniformity
6. 10475627 - Carrier ring wall for reduction of back-diffusion of reactive species and suppression of local parasitic plasma ignition
7. 10214816 - PECVD apparatus for in-situ deposition of film stacks
8. 10043655 - Plasma activated conformal dielectric film deposition
9. 9633896 - Methods for formation of low-k aluminum-containing etch stop films
10. 9589799 - High selectivity and low stress carbon hardmask by pulsed low frequency RF power
11. 9570274 - Plasma activated conformal dielectric film deposition
12. 9399228 - Method and apparatus for purging and plasma suppression in a process chamber
13. 9240320 - Methods of depositing smooth and conformal ashable hard mask films
14. 9153482 - Methods and apparatus for selective deposition of cobalt in semiconductor processing
15. 9028924 - In-situ deposition of film stacks