San Jose, CA, United States of America

Girish Anant Dixit



Average Co-Inventor Count = 4.1

ph-index = 22

Forward Citations = 2,843(Granted Patents)

Forward Citations (Not Self Cited) = 2,821(Dec 10, 2025)


Inventors with similar research interests:


Location History:

  • Plano, TX (US) (1998 - 2005)
  • San Jose, CA (US) (2001 - 2024)

Company Filing History:


Years Active: 1998-2025

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Areas of Expertise:
Atomic Layer Etching
Lithographic Apparatus
Nanolaminates
Interfacial Capping Layers
Dielectric Materials
Electroless Deposition
Magnetron Sputtering
Integrated Circuit Interconnects
Electroplating Techniques
Copper Via Filling
Patterning Process Control
Organic Additives Analysis
56 patents (USPTO):Explore Patents

Title: Innovator Spotlight: Girish Anant Dixit

Introduction:

Girish Anant Dixit, a prolific inventor based in San Jose, CA, is renowned for his significant contributions to the field of advanced patterning and nanolaminate technologies. With an impressive portfolio of 54 patents, his innovative work has left a lasting impact on the semiconductor industry.

Latest Patents:

Among his recent patents, one notable invention is the 'Method of controlling a patterning process, lithographic apparatus, metrology apparatus lithographic cell, and associated computer program.' This method allows for precise corrections of parameters in a patterning process, optimizing exposure and process control to minimize variations in critical dimensions of structures.

Another groundbreaking patent is 'Soft landing nanolaminates for advanced patterning,' which details techniques for depositing nanolaminate protective layers over core layers. These protective layers facilitate the deposition of high-quality conformal films, particularly beneficial for advanced multiple patterning schemes.

Career Highlights:

Girish Anant Dixit has made significant contributions while working at renowned companies such as Applied Materials, Inc., and Texas Instruments Corporation. His expertise and innovative mindset have led to the development of cutting-edge technologies that have set new benchmarks in the industry.

Collaborations:

Throughout his career, Girish Anant Dixit has collaborated with esteemed professionals in the field. Notably, his work with Fusen E Chen and Srinivas Gandikota has resulted in synergistic efforts that have propelled advancements in semiconductor technologies.

Conclusion:

In conclusion, Girish Anant Dixit stands out as a visionary inventor who continues to push the boundaries of innovation in the semiconductor industry. His dedication to developing novel solutions and his collaborations with industry experts highlight his exceptional contributions to the field. Girish Anant Dixit's patents and inventions underscore his commitment to driving technological progress and shaping the future of advanced patterning technologies.

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