The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2013
Filed:
Oct. 10, 2007
Joseph Yudovsky, Campbell, CA (US);
Lawrence C. Lei, Milpitas, CA (US);
Salvador Umotoy, Antioch, CA (US);
Tom Madar, Sunnyvale, CA (US);
Girish Dixit, San Jose, CA (US);
Gwo-chuan Tzu, Sunnyvale, CA (US);
Joseph Yudovsky, Campbell, CA (US);
Lawrence C. Lei, Milpitas, CA (US);
Salvador Umotoy, Antioch, CA (US);
Tom Madar, Sunnyvale, CA (US);
Girish Dixit, San Jose, CA (US);
Gwo-Chuan Tzu, Sunnyvale, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
The invention provides a removable first edge ring configured for pin and recess/slot coupling with a second edge ring disposed on the substrate support. In one embodiment, a first edge ring includes a plurality of pins, and a second edge ring includes one or more alignment recesses and one or more alignment slots for mating engagement with the pins. Each of the alignment recesses and alignment slots are at least as wide as the corresponding pins, and each of the alignment slots extends in the radial direction a length that is sufficient to compensate for the difference in thermal expansion between the first edge ring and the second edge ring.