The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2025
Filed:
Nov. 15, 2019
Lam Research Corporation, Fremont, CA (US);
Akhil N. Singhal, Portland, OR (US);
Bart Jan van Schravendijk, Palo Alto, CA (US);
Girish A. Dixit, San Jose, CA (US);
David C. Smith, Lake Oswego, OR (US);
Siva Krishnan Kanakasabapathy, Pleasanton, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
In some examples, a method of processing a substrate comprises applying a photoresist (PR) onto a surface of the substrate, pre-exposing the PR to ultra violet (UV) light before depositing or etching a metal oxide (MO) layer onto the PR, and depositing or etching a MO layer onto the PR subsequent to pre-exposing the PR to UV light.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile