The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2011
Filed:
Jan. 30, 2009
Kaihan Ashtiani, Cupertino, CA (US);
Raashina Humayun, Fremont, CA (US);
Girish Dixit, San Jose, CA (US);
Anna Battaglia, AciCastello, IT;
Stefano Rassiga, Caltignaga, IT;
Kaihan Ashtiani, Cupertino, CA (US);
Raashina Humayun, Fremont, CA (US);
Girish Dixit, San Jose, CA (US);
Anna Battaglia, AciCastello, IT;
Stefano Rassiga, Caltignaga, IT;
Novellus Systems, Inc., San Jose, CA (US);
Abstract
Heater elements made of high resistivity ternary and quaternary thin films containing three or more of W, C, O, N and Si are provided. The thin films have resistivities at least about 1000 μΩ-cm at 50 to 60 Angstroms. The ternary and quaternary films have improved stability over binary films on anneal. Methods of depositing the thin films are also provided. The methods involve depositing the film from an organometallic tungsten precursor under conditions such that a highly resistive, continuous film is formed.